원자간력 현미경을 이용한 구면 형상 측정

다국어 초록 (Multilingual Abstract)

This paper presents a method to measure a spherical shape using atomic force microscope. Experiments are performed to measure a radius of spherical lens. The proposed method is rigorously compared with the coordinate measuring machine. The repetition accuracy and the effects of the set point are also studied. The experimental results show that the proposed method is useful and should be effective to measure the micro-accuracy global shape of mezzo/micro parts using atomic force microscope. However, further research is required to compensate for the error associated with angle between the cantilever tip and the measured surface.

목차 (Table of Contents)

• Abstract
• 1. 서론
• 2. 원자간력 현미경을 이용한 형상 측정
• 3. 구면 형상 측정
• 4. 측정 및 결과 분석
• 5. 반경 측정 방법의 개선
• 6. 결론
• 후기
• 참고문헌