Surface Analysis and Humidity-Sensing Properties of Carbon Nitride Films for Microsensors

다국어 초록 (Multilingual Abstract)

Carbon nitride lms were deposited on silicon substrate by a reactive RF magnetron sputtering system with DC bias for microsensors. Surface analysis of deposited flms was performed by XRD, SEM, and TEM. The lm had good uniformity and small grain size of about 30 nm. EDS analysis
revealed that the chemical state of the carbon nitride lm was C2N.
The impedance of a CNx humidity sensor which had micro-holes decreased from 249.4 k to 14.2 k in the relative humidity
range from 5 % to 95 %. As the sensing area of the sensor decreased, the sensitivity slope increased proportionally.
Hysteresis was about 8 % FSO, and adsorption and desorption time were about 79 sec and 90 sec, respectively. Experimental results indicate that CNx flms can be a new candidate for Si-based micro-humidity sensors.