초고주파수 진동 감지를 위한 이온 질량기반 진동센서

다국어 초록 (Multilingual Abstract)

This paper presents ion-based micro vibration sensor for the ultra-high frequency vibration detection. Presented sensor uses the motion of anion and cation in an electrolyte. Electrolyte vibration sensors have the high shock survival characteristics and a simple read-out circuit because of the small mass and own charges of ions. Presented sensor measures the induced electric potential by the mechanical-electrical coupling. It consist of electrolyte chamber and detection electrode. Electrolyte chamber was fabricated by PDMS molding. Detection electrode was made of gold evaporation on pyrex glass. Size of electrolyte chamber was designed as 600×600×100㎛. Detection electrode had 200㎚-thick and 42㎛-gap. In the experimental study, 5.8M sodium Chloride (NaCl) solution was used as electrolyte in 36nl-chamber. Mechanical vibration was measured from 2kHz to 4㎒.

목차 (Table of Contents)

• Abstract
• 1. 서론
• 2. 동작원리 및 이론
• 3. 설계 및 제조 공정
• 4. 실험방법 및 실험결과
• 5. 결론
• 후기
• 참고문헌

참고문헌 (Reference)

1 Zana, R., "UltraSonic Vibration Potentials" 14 : 1-60, 1982

2 Koneshan, S., "Solvent Structure, Dynamics, and Ion Mobility in Aqueous Solutions at 25°C" 102 : 4193-4204, 1998

3 Ki-Ho Han, "Self-Balanced Navigation-Grade Capacitive Microaccelero meters Using Branched Finger Electrodes and Their Performance for Varying Sense Voltage and Pressure" 12 (12): 11-20, 2003

4 Brüel, "High frequency Piezoelectric Accelerometer, Data sheet"

5 J. Carlos Santamarina, "Dynamic Electrical-Mechanical Energy Coupling in Electrolyte-Mineral System" 50 : 153-178, 2003

6 Marlow, B. J., "Colloid Vibration Potential and the Electrokinetic Characterization of Concentrated Colloids" 4 : 611-626, 1988

7 Debye, P., "A Method for the Determination of the Mass of Electrolytic Ions" 1 : 13-17, 1933