선택적 에미터 결정질 실리콘 태양전지 제작을 위한 할로겐 램프 장치 개발 = Equipment Manufacturing of Lamp Heating to Fabricate Selective Emitter Silicon Solar Cell

다국어 초록 (Multilingual Abstract)

Halogen lamp was applied to fabricate the selective emitter crystalline silicon solar cell. In selective emitter structure, the recombination of minority carriers is reduced with heavily doped emitter under metal grid, consequently improving the conversion efficiency. Laser selective emitter process which is recently used the most generally induces the damage on the silicon surface. However the lamp has enough heat to form heavily doped emitter layer by diffusing phosphorus from PSG without surface damage. In this work, we have studied to find the design and the suitable condition for halogen lamp such as power, time, temperature and figured out the possibility to fabricate the selective emitter silicon solar cell by lamp heating. The sheet resistance with 100Ω/□ was lower to 50Ω/□ after halogen lamp treatment. Heat transfer to lightly doped emitter region was blocked by using the shadow mask.

목차 (Table of Contents)

• Abstract 1. 서론 2. 장치 구성 3. 실험 방법 4. 실험결과 및 고찰 5. 결론 References

참고문헌 (Reference)

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