NiFe/Ta(t)/NiFe 박막을 이용한 평면홀 바이오센서로서 고감도 특성 연구

다국어 초록 (Multilingual Abstract)

As a device that measures a fine magnetic field to be used as a biosensor, a simple multilayered cross-shaped current and voltage terminals are formed. The sensitivity of planar Hall voltage sensitivity (SPHV) were obtained from the planar Hall voltage (PHV) curve, which was measured by applying an external magnetic field perpendicular to the magnetization easy axis. The PHV curve for the NiFe(6 nm)/Ta(20 nm)/NiFe(6 nm) multilayer changed linearly in the region of ±0.9 Oe, and the SPHV was 500 µV/Oe. In particular, as the increased sensing current from 1.0 mA to 40 mA, the SPHV was from 2.0 mV/Oe to 398 µV/Oe. These results suggested the possibility of developing a PHR biosensor with high sensitivity even with a multilayer structure formed of a bottom Ta layer and a ferromagnetic NiFe layer.

참고문헌 (Reference)

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