Investigation of ferromagnetic resonance and damping properties of CoFeB

다국어 초록 (Multilingual Abstract)

In this study, the influences of thin film thickness and post-annealing process on the magnetic properties of CoFeB thin films were investigated. The angular dependency and linewidth of the ferromagnetic resonance signal were used to explore the magnetic behavior of sputtered single-layer and trilayer thin film stacks of CoFeB. A micromagnetic simulation model was employed based on the metropolis algorithm comprising the demagnetizing field and in-plane induced uniaxial anisotropy terms with all relevant contributions. Our results reveal that the direction of magnetization changes from in-plane to out-of-plane as a result of the annealing process and induces a perpendicular magnetic anisotropy in the 1-nm thick CoFeB thin film. The ferromagnetic resonance (FMR) linewidth can be defined well by the intrinsic Gilbert damping effect and the magnetic inhomogeneity contribution in both as-grown and annealed samples. The difference between the linewidths of the single and trilayer film is mainly caused by the spin pumping effect on damping which is associated with the interface layers.

참고문헌 (Reference)

1 N. Lu, "Universal carrier thermoelectric-transport model based on percolation theory in organic semiconductors" 91 : 195205-, 2015

2 J. Lindner, "Two-magnon damping in thin films in case of canted magnetization: Theory versus experiment" American Physical Society (APS) 80 (80): 224421-, 2009

3 Taner Kalaycı, "Tuning magnetic properties of non-collinear magnetization configuration in Pt/[Pt/Co] 6 /Pt/Co/Pt multilayer structure" Elsevier BV 436 : 11-16, 2017

4 SeungMo Yang, "Thermally stable perpendicular magnetic anisotropy features of Ta/TaOx/Ta/CoFeB/MgO/W stacks via TaOx underlayer insertion" AIP Publishing 116 (116): 113902-, 2014

5 T. Zhu, "The study of perpendicular magnetic anisotropy in CoFeB sandwiched by MgO and tantalum layers using polarized neutron reflectometry" AIP Publishing 100 (100): 202406-, 2012

6 W. X. Wang, "The perpendicular anisotropy of Co40Fe40B20 sandwiched between Ta and MgO layers and its application in CoFeB/MgO/CoFeB tunnel junction" AIP Publishing 99 (99): 012502-, 2011

7 Shigemi Mizukami, "The Study on Ferromagnetic Resonance Linewidth for NM/80NiFe/NM (NM=Cu, Ta, Pd and Pt) Films" Japan Society of Applied Physics 40 (40): 580-585, 2001

8 T. G. a. Verhagen, "Temperature dependence of spin pumping and Gilbert damping in thin Co/Pt bilayers" 28 : 056004-, 2016

9 N. Lu, "Temperature , electric-field , and carrier-density dependence of hopping magnetoresistivity in disordered organic semiconductors" 165205-, 2017

10 C. Okay, "Tailoring the magnetic anisotropy of cobalt-gold thin lms" The Scientific and Technological Research Council of Turkey 42 (42): 335-341, 2018

11 Andreas Kaidatzis, "Tailoring the magnetic anisotropy of CoFeB/MgO stacks onto W with a Ta buffer layer" AIP Publishing 106 (106): 262401-, 2015

12 Yang You, "TaB2 powders synthesis by reduction of Ta2O5 with B4C" Elsevier BV 43 (43): 897-900, 2017

13 D. Ley Domínguez, "Strong magnetization damping induced by Ag nanostructures in Ag/NiFe/Ag trilayers" AIP Publishing 114 (114): 023905-, 2013

14 D. C. Worledge, "Spin torque switching of perpendicular Ta∣CoFeB∣MgO-based magnetic tunnel junctions" AIP Publishing 98 (98): 022501-, 2011

15 A. A. Baker, "Spin pumping in magnetic trilayer structures with an MgO barrier" Springer Science and Business Media LLC 6 (6): 1-7, 2016

16 Kh. Zakeri, "Spin dynamics in ferromagnets: Gilbert damping and two-magnon scattering" American Physical Society (APS) 76 (76): 104416-, 2007

17 A. A. Timopheev, "Second order anisotropy contribution in perpendicular magnetic tunnel junctions" Springer Science and Business Media LLC 6 (6): 2016

18 B. Heinrich, "Role of spin current in magnetic relaxations of metallic multilayer films" Elsevier BV 258-259 : 376-381, 2003

19 Sumanta Mukherjee, "Role of boron diffusion in CoFeB/MgO magnetic tunnel junctions" American Physical Society (APS) 91 (91): 2015

20 Justin M. Shaw, "Resolving the controversy of a possible relationship between perpendicular magnetic anisotropy and the magnetic damping parameter" AIP Publishing 105 (105): 062406-, 2014

21 A. A. Greer, "Observation of boron diffusion in an annealed Ta/CoFeB/MgO magnetic tunnel junction with standing-wave hard x-ray photoemission" AIP Publishing 101 (101): 202402-, 2012

22 D. D. Lam, "MgO Overlayer Thickness Dependence of Perpendicular Magnetic Anisotropy in CoFeB Thin Films" 한국물리학회 62 (62): 1461-1464, 2013

23 S. Mizukami, "Magnetic relaxation of normal-metal (NM)/80NiFe/NM films" Elsevier BV 239 (239): 42-44, 2002

24 S. Azzawi, "Magnetic damping phenomena in ferromagnetic thin-films and multilayers" 50 : 47300130-, 2017

25 M. Farle, "Magnetic Nanostructures" Springer 37-83, 2013

26 Mikihiko Oogane, "Magnetic Damping in Ferromagnetic Thin Films" Japan Society of Applied Physics 45 (45): 3889-3891, 2006

27 Xuanru Ren, "Low temperature synthesis of pure phase TaB2 powders and its oxidation protection modification behaviors for Si-based ceramic coating in dynamic oxidation environments" Elsevier BV 44 (44): 15517-15525, 2018

28 T. Liu, "Large enhanced perpendicular magnetic anisotropy in CoFeB/MgO system with the typical Ta buffer replaced by an Hf layer" AIP Publishing 2 (2): 032151-, 2012

29 M. Belmeguenai, "Investigation of the annealing temperature dependence of the spin pumping in Co 20 Fe 60 B 20/Pt systems" AIP Publishing 123 (123): 113905-, 2018

30 Xi Chen, "Interfacial electronic structure-modulated magnetic anisotropy in Ta/CoFeB/MgO/Ta multilayers" AIP Publishing 105 (105): 092402-, 2014

31 Shaohai Chen, "Interfacial effect on the ferromagnetic damping of CoFeB thin films with different under-layers" AIP Publishing 103 (103): 032402-, 2013

32 Yung-Hung Wang, "Interfacial and annealing effects on magnetic properties of CoFeB thin films" AIP Publishing 99 (99): 08M307-, 2006

33 Chen Luo, "Interface effects of the magnetic properties in Nd/Ni80Fe20 bilayer films" AIP Publishing 117 (117): 17A702-, 2015

34 Jaivardhan Sinha, "Influence of boron diffusion on the perpendicular magnetic anisotropy in Ta|CoFeB|MgO ultrathin films" AIP Publishing 117 (117): 043913-, 2015

35 Shujuan Yuan, "Increased ferromagnetic resonance linewidth and exchange anisotropy in NiFe/FeMn bilayers" AIP Publishing 105 (105): 063902-, 2009

36 N. Miyakawa, "Impact of Ta Diffusion on the Perpendicular Magnetic Anisotropy of Ta/CoFeB/MgO" Institute of Electrical and Electronics Engineers (IEEE) 4 : 1000104-1000104, 2013

37 Gwang-Guk An, "Highly enhanced perpendicular magnetic anisotropic features in a CoFeB/MgO free layer via WN diffusion barrier" Elsevier BV 110 : 217-225, 2016

38 H. Q. Tu, "Gilbert damping in CoFeB/GaAs(001) film with enhanced in-plane uniaxial magnetic anisotropy" Springer Science and Business Media LLC 7 (7): 1-8, 2017

39 R. F. Soohoo, "General Spin-Wave Dispersion Relations" American Physical Society (APS) 120 (120): 1978-1982, 1960

40 F. Yildiz, "Ferromagnetic resonance studies on (Co40Fe40B20)x(SiO2)1−x granular magnetic films" Elsevier BV 305 (305): 24-27, 2006

41 M. Farle, "Ferromagnetic resonance of ultrathin metallic layers" 61 : 755-826, 1998

42 Xiaoyong Liu, "Ferromagnetic resonance and damping properties of CoFeB thin films as free layers in MgO-based magnetic tunnel junctions" AIP Publishing 110 (110): 033910-, 2011

43 R.F. Soohoo, "Ferromagnetic and spin-wave resonance in multilayer films" 63 : 1988

44 Y. Xu, "FMR study on magnetic thin and ultrathin Ni-Fe films" Wiley 1 (1): 3698-3701, 2004

45 B. Z. Rameev, "FMR study of strain-induced magnetic anisotropies in CrO2 thin films" Wiley 201 (201): 3350-3353, 2004

46 Rodrigo Arias, "Extrinsic contributions to the ferromagnetic resonance response of ultrathin films" American Physical Society (APS) 60 (60): 7395-7409, 1999

47 R. F. Soohoo, "Excitation and Boundary Effects in Spin-Wave Resonance" AIP Publishing 32 (32): S148-S150, 1961

48 K. Lenz, "Evidence of spin-pumping effect in the ferromagnetic resonance of coupled trilayers" American Physical Society (APS) 69 (69): 1-7, 2004

49 Chi-Feng Pai, "Enhancement of perpendicular magnetic anisotropy and transmission of spin-Hall-effect-induced spin currents by a Hf spacer layer in W/Hf/CoFeB/MgO layer structures" AIP Publishing 104 (104): 082407-, 2014

50 M. Özdemir, "Electron spin resonance (ESR) and resistivity measurements on NiMn, NiMnPt and CrFe alloys thin films" Istanbul Technical Univ., Inst. Pure Appl. Sci. 1998

51 S. Mizukami, "Effect of spin diffusion on Gilbert damping for a very thin permalloy layer in Cu/permalloy/Cu/Pt films" American Physical Society (APS) 66 (66): 1-9, 2002

52 Bret Heinrich, "Dynamic Exchange Coupling in Magnetic Bilayers" American Physical Society (APS) 90 (90): 187601-, 2003

53 J. Lindner, "Cu ferromagnetic resonance in coupled ultrathin films" 15 : S465-S478, 2003

54 B. Dieny, "Crossover from easy-plane to perpendicular anisotropy in magnetic thin films : canted anisotropy due to partial coverage or interfacial roughness" 25 : 723-728, 1994

55 H. Meng, "Annealing effects on CoFeB-MgO magnetic tunnel junctions with perpendicular anisotropy" AIP Publishing 110 (110): 033904-, 2011

56 Nianduan Lu, "A review of carrier thermoelectric-transport theory in organic semiconductors" Royal Society of Chemistry (RSC) 18 (18): 19503-19525, 2016

57 S. Ikeda, "A perpendicular-anisotropy CoFeB–MgO magnetic tunnel junction" Springer Science and Business Media LLC 9 (9): 721-724, 2010