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https://www.riss.kr/link?id=O39839327
1997년
eng
1084-6999
학술저널
ANNUAL INTERNATIONAL WORKSHOP ON MICRO ELECTRO MECHANICAL SYSTEMS
84-89 [※수록면이 p5 이하이면, Review, Columns, Editor's Note, Abstract 등일 경우가 있습니다.]
078033745X; 0780337441; 0780337468
Micro electro mechanical systems: investigation of micro structures, sensors, actuators, machines and robots
Annual international workshop; 10th
Nagoya; Japan
1997; Jan
0
상세조회0
다운로드
A Decade of MEMS and its Future
Grand in Purpose, Insignificant in Size
Miniaturized Chemical Analysis Systems Based on Electroosmotic Flow
Integrated Micro-Laser Displacement Sensor