Ferroelectric layered-perovskite SrBi2Nb2O9 (SBN) thin lms have been deposited on Si (100) substrates by metalorganic decomposition method. The crystallization process of the SBN thin lms post-annealed under various temperature conditions was investig...
Ferroelectric layered-perovskite SrBi2Nb2O9 (SBN) thin lms have been deposited on Si (100) substrates by metalorganic decomposition method. The crystallization process of the SBN thin lms post-annealed under various temperature conditions was investigated using transmission electron microscopy (TEM). The SBN thin lms annealed up to 600 C had a uorite-like phase and had nano-sized round grains. High resolution TEM study revealed that the uorite-like phase was cubic Bi2O3. However, the SBN thin lm annealed at 700 C had a layered-perovskite SBN phase with very large grains about 0.2 - 0.3 m. It was found that these large grains originated from the agglomeration of the small round grains having similar orientations rather than from the growth of small grains.