LiNb03 광 도파로 제작에 관한 연구 = A Study on a Fabrication of LiNb03 Optical Waveguide

다국어 초록 (Multilingual Abstract)

LiNbO3 has an excellent electro-optic effect as well as a relatively large figure of merit for the acoustooptic effect. In addition, low-loss LiNbO3 waveguides are easily fabricated. LiNbO3, therefore, has been widely used as the substrate in funtional waveguide devices. Thus, in this paper, optical waveguide and Y -branch are fabricated under the conditions of a Ti width of 7㎛, a Ti thickness of 950Å, and a diffusion condition of 103 0˚C for 8 hours in wet 02 atmosphere on Z-cut LiNbO3 substrate by Ti indiffusion method. Also, near field pattern of strip waveguide and Y-branch are observed by end fire coupling.

목차 (Table of Contents)

• Ⅰ. 서론 3
• Ⅱ. 본론 4
• 1. Ti:LiNbO3 광 도파로 4
• 2. 광 도파로 및 Y-branch 설계 6
• 3. 광 도파로 및 Y-branch 제작 11
• 1) LN 웨이퍼 세척(Wager Cleaning) 11
• 2) Ti 증착(Ti Deposition) 12
• 3) PR Coating(Photoresist Coating) 12
• 4) Soft Baking(Pre-Baking) 12
• 5) 노광(UV Exposure) 13
• 6) 현상(Development) 13
• 7) Hard Baking(Post-Baking) 13
• 8) 습식식각(Wet Etching) 13
• 9) Pr 제거(Photoresist Removing) 14
• 10) Ti 확산(Ti In-diffusion) 14
• 11) LiNbO3 연마(LiNbO3 Polishing) 14
• Ⅲ. 광 도파 특성 측정 16
• Ⅳ. 결과 및 고찰 19