PDMS를 이용한 마이크로 구동기의 제작 및 평가 = Detection of Tool Failure by Wavelet Transform

다국어 초록 (Multilingual Abstract)

In this study, we propose and develop PDMS-based modular actuators. The microactuator which looks like a small insect uses thermal expansion power of the PDMS (polydimethylsiloxane; sylgar®184 silicone elastomer). The PDMS-based microactuator provides a large displacement due to a high thermal expansion coefficient (approximately 310ppm). The microacruator with 1㎜ length 350 ㎛ width is optimized by using a numerical analysis. The shape of the PDMS actuatoris variously designed. They are placed at several positions to find the optimal position that provides a high transformation ratio. The PDMS-based microactuators are fabricated using a conventional micromaching technique. The fabricated microactuator is heated using a hot-plate. The actuator displacement is measured as a function of temperature from 27℃ to 300℃. The experimental results are compared to the simulation result. When heating temperature up to 300℃ is applied to the PDMS actuator, each V-groove-shaped joint is actuated 30 μ mat 300℃. Anotherdesign of the microactuator has a maximum displacement of about 656㎜.

목차 (Table of Contents)

• ABSTRACT
• 1. 서론
• 2. 재료 특성
• 3. 구동기 구동원리 및 제작
• 4. 구동기 평가
• 5. 결론
• 후기
• 참고문헌

참고문헌 (Reference)

1 Gregory T.A. Kovacs, "Micromachined transducers sourcebook" McGraw-Hill 289-294, 2000

2 D. W. Lee, "MEMS-based modular actuator for capsular endoscope applications" 84 : 1278-1281, 2002

3 S. I. chang, "Fabrication of microlens array by using a new diffuser lithography and its characterization" 363-, 2005

4 D. W. Lee, "Evaluation of PDMS-based thermal micro-actuator" Sensors & Materials, in press 2007

5 J. Garra, "Dry etching of polydimethylsiloxane for microfluidic systems" A20 (A20): 975-982, 2002

6 T. Ebefors, "A robust micro conveyer realized by arrayed polyimide joint actuators" 10 : 337-349, 2000