In this paper, the FDTD method is employed to calculate the static capacitance of several parallel-plate capacitors. The study of the capacitor characteristics is made to emphasis on the linearity analysis for the possible sensor application. The line...
In this paper, the FDTD method is employed to calculate the static capacitance of several parallel-plate capacitors. The study of the capacitor characteristics is made to emphasis on the linearity analysis for the possible sensor application. The linearity of several parallel-plate structures is examined, which include a simple parallelplate capacitor, a parallel-plate structure with guard ring only, etc. Although the guard ring is usually utilized to increase the linearity of a simple parallel-plate capacitor, it is found that the linearity of a parallel-plate capacitor with guard ring is actually the same as a simple parallel-plate capacitor with the same plate area. Afterwards, a new parallel-plate structure with pins inserted in between the parallel plates is proposed to reduce the linearity deviation as the separation of the parallel plates changes.