고효율 Solar Cell 제조를 위한 Firing 공정 조건의 최적화 = Optimization of the firing process condition for high efficiency solar cells on single-crystalline silicon

다국어 초록 (Multilingual Abstract)

This paper represents modeling and optimization techniques for solar cell process on single-crystalline float zone (FZ) wafers with high efficiency; There were the four significant processes : ⅰ)emitter formation by diffusion, anti-reflection-coating (ARC) with silicon nitride using plasma-enhanced chemical vapor deposition (PECVD); ⅲ)screen-printing for front and back metallization; and ⅳ)contact formation by firing. In order to increase the performance of solar cells, the contact formation process is modeled and optimized. This paper utilizes the design of experiments (DOE) in contact formation to reduce process time, fabrication costs. The experiments were designed by using central composite design which is composed of 2⁴ factorial design augmented by 8 axial points with three center points. After contact formation process, the efficiency of the solar cell is modeled using neural networks. This model is used to analyse the characteristics of the process, and to optimize the process condition using genetic algorithms (GA). Finally, find optimal recipe for solar cell efficiency.

목차 (Table of Contents)

• Abstract
• Ⅰ. 서론
• Ⅱ. 실험방법
• Ⅲ. 결론
• [참고문헌]