MEMS 기술을 이용한 수소이온 감지 센서 제작 및 특성

다국어 초록 (Multilingual Abstract)

It has seen increasing use of micromaching processes in fabrication of miniature physical and chemical sensors. There are many sensors with potential application to biosensor development, clinical diagnosis. so we present a micromachined pH sensor that measures H^+ activity in a aqueous solution. Micromachined pH sensor was comprised of basic element of pH glass electrode in 3-dimensional Si structure and it was processed with bulk micromachining technology, such as with Si anisotropic etching, metal evaporation and bonding.
Reference electrode was formed thin film Ag/AgCl electrode with anodizing and KCrO_3Cl solution reaction after Ag thin film was evaporated on Si anisotropic etched surface. Indicator electrode was bonded under etched structure after polished Soda-lime glass that contains over 20% Na^+ with 100㎛ thickness. Liquid junction was formed by boding liquid junction which inserted vagetable gelatin on the other anisotropic etching structure. Reponse property of MEMS type pH sensor showed the linear slope of 90mV/pH using pH buffer solutions about two types of reference electrode(anodizing and KCrO_3Cl formed Ag/AgCl electrode). It is confirmed that the pH sensor with reference electrode formed as KCrO_3Cl solution is superior to stable potential in the long term test.