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https://www.riss.kr/link?id=O39876286
1996년
eng
1084-6999
학술저널
ANNUAL INTERNATIONAL WORKSHOP ON MICRO ELECTRO MECHANICAL SYSTEMS
19-24 [※수록면이 p5 이하이면, Review, Columns, Editor's Note, Abstract 등일 경우가 있습니다.]
0780329864; 0780329856; 0780329872
Micro electro mechanical systems: an investigation of micro structures, sensors, actuators, machines and systems
Annual international workshop; 9th
The 9th annual international workshop on micro electro mechanical systems; an investigation of micro structures, sensors, actuators, machines and systems
San Diego; CA
1996; Feb
0
상세조회0
다운로드
Porous Silicon - A New Material for MEMS
Single-Crystal Silicon Actuator Arrays for Micro Manipulation Tasks
Laminated High-Aspect-Ratio Microstructures in a Conventional CMOS Process
A 1.5V Supplied, CMOS ASIC for the Actuation of an Electrostatic Micromotor