OLED Barrier와 Encapsulation을 위한 원자층 증착 Polymer / Al₂O₃ 다층 필름의 온습도 신뢰도 평가 분석 = Reliability Evaluation of Atomic layer Deposited Polymer / Al₂O₃ Multilayer Film for Encapsulation and Barrier of OLEDs in High Humidity and Temperature Environments

다국어 초록 (Multilingual Abstract)

Encapsulation of organic based devices is essential issue due to easy deterioration of organic material by water vapor. Atomic layer deposition (ALD) is a promising solution because of its low temperature deposition and quality of the deposited film. Moisture permeation has a mechanism to pass through defects, Thin Film Encapsulation using inorganic / organic / inorganic hybrid film has been used as promising technology. $Al_2O_3$ / Polymer / $Al_2O_3$ multilayer film has shown excellent environmental protection characteristics despite of thin thicknesses of the films.