This paper describes a study on EC recycling system for PR stripping in Semiconductor Process. EC is very useful chemical for PR stripping but it is difficult to recycle. We have developed a system to recycle the EC with ozone gas. The experimental re...
This paper describes a study on EC recycling system for PR stripping in Semiconductor Process. EC is very useful chemical for PR stripping but it is difficult to recycle. We have developed a system to recycle the EC with ozone gas. The experimental results show that EC can be recycled about 10 times through this system.