전산유체역학을 이용한 전자산업 클린룸내 포장공정에서의 환기시스템 개선 = A ventilation evaluation for final packing process of microelectronics cleanrooms by using computational fluid dynamics

다국어 초록 (Multilingual Abstract)

The purpose of this study is to investigate information on performance of ventilation in high-tech microelectronicscleanrooms using computational fluid dynamics (CFD). One liquid crystal display (LCD) company was examinedfor evaluating the relationship between workplace concentration and ventilation rate efficiency by using CFDsoftware, Airpak 3.0v. Acetone concentration in cleanroom for final packing process, which is inspected LCD was40.1 ppm (GSD 1.91) (n = 55) as geometric mean, ranged 7.8~128.7 ppm and weakly correlated with ventilationrate efficiency (R2 = 0.37, p < 0.01). Resulting from computational fluid dynamics (CFD), acetone concentrationcan be reduced 62% when install booth type local exhaust system, the most efficient way among 10 other differentventilation methods like increasing volume of general ventilation, changing the location of workers, supply orexhaust diffusers and install downstream type local exhaust system, etc. We found that volitile organic compoundsin cleanroom can be a matter of adverse health effects and the concentration was correlated with ventilation rateefficiency. The most optimized plan to control the contaminants in solvent cleaning work in cleanroom was boothtype local exhaust system.

참고문헌 (Reference)

1 정은교, "전자산업 청정실의 작업환경 및 유해물질농도 평가" 한국산업보건학회 19 (19): 280-287, 2009

2 김태형, "자연환기 벤틸레이터의 댐퍼 형태별 환기량 조절능력 평가" 한국산업보건학회 16 (16): 364-374, 2006

3 하현철, "자연환기 벤틸레이터 형태에 따른 환기 특성" 한국산업보건학회 12 (12): 2002

4 김태형, "자동차 조립 공장의 검차라인 환기 방안" 한국산업보건학회 14 (14): 59-70, 2004

5 하현철, "일반형 자연환기 벤틸레이터 배기유량 산정" 한국산업보건학회 12 (12): 2002

6 한화택, "실간환기량 측정을 위한 추적가스 실험방법론에 관한 연구" 대한설비공학회 21 (21): 606-612, 2009

7 장경진, "상관분석에 의한 지하역사의 오염발생 특성" 한국실내환경학회 8 (8): 309-320, 2011

8 Korea Electronics Assocation, "Yearbook of IT industry statistics" Korea Electronics Assocation

9 Han, H. T., "Ventilation effectiveness measurements utilizing a tracer gas in an underfloor air" 10 (10): 610-618, 1998

10 Olav R. Hansen, "Using computational fluid dynamics (CFD) for blast wave predictions" 23 (23): 885-906, 2010

11 Alexy Kolesnikov, "Use of computational fluid dynamics to predict airflow and contamination concentration profiles within laboratory floor plan environment" 11 (11): 197-214, 2006

12 Korea Air Cleaning Asociation, "Test Methods for Performance Evaluation of Cleanrooms and Associated Controlled Environments, SPS-KACA003-0133"

13 "Statistical Database : Survey of Mining And Manufacturing" KOSIS

14 Niels, V. H., "Sampling plan for cleanroom classification with respect to airborne particles" 54 (54): 1-15, 2011

15 TSI, "Model 8386 A, VelociCalc Plus Multi-Parameter Ventilation Meter"

16 Kim, T. H., "Investigation of standard design guidelines for ventilation systems in industry with occurring an occupational disease by using hazardous chemical substance" Occupational Safety and Health Research Institute 521-522, 2009

17 ISO, "International Standard ISO DIS 14644-1;Classification of air cleanliness edited revision 10/37/97" International Organization for Standardization

18 "IES-RP-CC006.2, Testing cleanrooms, Revised 1993" Institute of environmental sciences and technology

19 Joseph LaDou, "Health issues in the global semiconductor industry" 23 (23): 765-769, 1994

20 Watterson, "Health and Safety Executive Inspection of U.K. Semiconductor Manufactures" 9 : 392-395, 2003

21 Baker, A. J., "Finite element computational fluid mechanics" Taylor & Francis 1983

22 Roh, Y. M., "Characteristic of effect on human body by cleaning room" 20 (20): 39-43, 2007

23 HSE, "Cancer among current and former workers at National Semiconductor" 2001

24 Ha, H. C., "Application of computational fluid dynamics on industrial ventilation engineering" 8 (8): 163-177, 1998

25 Chung, E. K., "An optimized ventilation plan for microelectronic cleanrooms by using computerized fluid dynamics" Occupational Safety and Health Research Institute 151-, 2007

26 Fluent Inc., "Airpak 3.0 User's guide"

27 "Airflow in the 300mm semiconductor factory" US Test & Balance Corporation

28 ASHRAE, "ASHRAE Handbook - 1997 Fundamentals, American Society of Heating, Refrigerating, and Air-Conditioning Engineers" 1997