In a electron beam lithography, pattern shapes are dependent on the scanning method. In this work, four types of scanning methods are implemented and their characteristics are investigated. For a 11x11um pattern, a Zigzag scanning method proves a prec...
In a electron beam lithography, pattern shapes are dependent on the scanning method. In this work, four types of scanning methods are implemented and their characteristics are investigated. For a 11x11um pattern, a Zigzag scanning method proves a precise pattern generation. The other ways such as SEM scanning and swirl in-out scanning method result in some distorted pattern shape.