동시스퍼터법에의한 Ta 도핑된 TiO₂박박 합성과 광전극 특성

다국어 초록 (Multilingual Abstract)

Ta-doped thin films were deposited on quartz and indium-tin oxide glass substrates using a co-sputtering
method. The Ta-doped films formed a solid solution that induced structural changes from rutile to anatase phase. The
anodic photocurrents of the Ta-doped TiO₂electrodes were observed not only in UV but also in the visible light range.
The photocurrent response in visible light on Ta-doped TiO₂films are due to bandgap reduction.

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