<P>The present study generated an extremely high vacuum of 10<SUP>−10</SUP> Pa by very common methods such as using SUS304 chamber material, electropolishing surface treatment and turbomolecular pumping technology. We examined ...
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https://www.riss.kr/link?id=A107691667
2006
-
SCOPUS,SCIE
학술저널
62-68(7쪽)
0
상세조회0
다운로드다국어 초록 (Multilingual Abstract)
<P>The present study generated an extremely high vacuum of 10<SUP>−10</SUP> Pa by very common methods such as using SUS304 chamber material, electropolishing surface treatment and turbomolecular pumping technology. We examined ...
<P>The present study generated an extremely high vacuum of 10<SUP>−10</SUP> Pa by very common methods such as using SUS304 chamber material, electropolishing surface treatment and turbomolecular pumping technology. We examined the gas phase and electron-stimulated desorption ions of the ion gauges, the effect of ambient temperature, total pressure and H<SUB>2</SUB> partial pressure. One of the results showed that, as is well known, most of the residual gas in the extremely high vacuum chamber was H<SUB>2</SUB> but there was also a little F, which is not so well known.</P>