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https://www.riss.kr/link?id=O39317568
1998년
eng
microsystems ; semiconductors ; sensors ; actuators ; MSM
학술저널
INTERNATIONAL CONFERENCE ON MODELING AND SIMULATION OF MICROSYSTEMS SEMICONDUCTORS SENSORS AND ACTUATORS
457-462 [※수록면이 p5 이하이면, Review, Columns, Editor's Note, Abstract 등일 경우가 있습니다.]
0966613503; 0966613511; 0966613538
Modeling and simulation of microsystems, semiconductors, sensors and actuators
International conference; 1st
Technical proceedings of the 1998 international conference on modeling and simulation of microsystems, semiconductors, sensors and actuators
Santa Clara; CA
1998; Apr
0
상세조회0
다운로드
Challenges in Process Modeling for MEMS
CMOS MEMS and their Simulation
Micromanipulation and Robotic Technology
Simulation and Modeling of Optoelectronic Devices, Circuits and Systems