A new valveless micropump for bi-directional application has been developed and tested. The micropump was fabricated by micromachining process. The micropump of this study consists of a membrane actuator, a pumping chamber, fluidic channels and two pi...
A new valveless micropump for bi-directional application has been developed and tested. The micropump was fabricated by micromachining process. The micropump of this study consists of a membrane actuator, a pumping chamber, fluidic channels and two piezoelectric ceramic films. The channels and pumping chamber were etched on a glass wafer and the membrane was made on a silion wafer which is actuated by a piezoelectric ceramic (PZT) film. The geometry of the micropump was optimized by numerical analysis and the performance of the micropump was investigated by the experiments.