그라디언트 변이 벡터 기반 패턴 측정에 관한 연구 = A study on the Precision Pattern Measurement Based on Gradient Transition Vector

다국어 초록 (Multilingual Abstract)

The adjustment of lens magnification can make the degree of precision in pattern measurement be improved, but several problems such as high cost, smaller field of view and stage error accumulation are followed. In this paper, a method for precisely measuring patterns is proposed based on gradient transition vector, in order to solve these problems. The performance of our method is evaluated using pattern images with several directions. Also, it is compared with previous methods based on edge and gray-level moment. It is judged that the proposed method outperforms consistent pattern width results, and so could be applied to automation processes for measurement and inspection of precise and complexed patterns in IT, BT industry products.

참고문헌 (Reference)

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