넙스기법을 활용한 스캐너-스테이지 연동 알고리즘

다국어 초록 (Multilingual Abstract)

We designed a synchronization control method to extend processing area that is limit of traditional laser processing system. Demands for high precision laser processing with wide area has been increasing for a number of applications such as in solar cell battery, display parts, electronic component, automobile industry, and so on. The ultra high speed laser scanner system is limited by its size of scanning area, for example 50×50㎟. Even though recently the laser scanner system was developed which can scan a wide area, the distortion of scanning quality may be serious as a scan area increasing. The developed method differentiates with an existing Step & Scanning method in that it can guarantee continuous stage movement, which may improve the processing speed and laser fabrication quality.