1 황진하, "초음파 테이블을 이용한 단결정 사파이어 웨이퍼의 ELID 연삭가공 특성 연구" 한국기계가공학회 12 (12): 75-80, 2013
2 김병창, "실리콘 웨이퍼 휨형상 측정 정밀도 향상을 위한 시스템변수 보정법" 한국기계가공학회 13 (13): 139-144, 2014
3 Monodane, T., "Thermo-Elastic-Plastic Analysis on Internal Processing Phenomena of Single-Crystal Silicon by Nanosecond Laser" 1 (1): 231-235, 2006
4 Fukuyo, F., "Stealth Dicing Technology and Applications" 1-7, 2005
5 Choi, J., "Increase of Ablation Rate using Burst Mode Femtosecond Pulses" JThD101-, 2007
6 Karnakis, D., "High Throughput Scribing for the Manufacture of LED Components" 207-211, 2004
7 Rezaei, S., "Burs-Train Generation for Femtosecond Laser Filamentation-driven micromachining" University of Toronto 2011
8 Ohmura, E., "Analysis of Processing Mechanism in Stealth Dicing of Ultra Thin Silicon Wafer" 2 (2): 540-549, 2008
9 Ohmura, E., "Analysis of Internal Crack Propagation in Silicon Due to Permeable Pulse Laser Irradiation: Study on Processing Mechanism of Stealth Dicing" 46-52, 2011
1 황진하, "초음파 테이블을 이용한 단결정 사파이어 웨이퍼의 ELID 연삭가공 특성 연구" 한국기계가공학회 12 (12): 75-80, 2013
2 김병창, "실리콘 웨이퍼 휨형상 측정 정밀도 향상을 위한 시스템변수 보정법" 한국기계가공학회 13 (13): 139-144, 2014
3 Monodane, T., "Thermo-Elastic-Plastic Analysis on Internal Processing Phenomena of Single-Crystal Silicon by Nanosecond Laser" 1 (1): 231-235, 2006
4 Fukuyo, F., "Stealth Dicing Technology and Applications" 1-7, 2005
5 Choi, J., "Increase of Ablation Rate using Burst Mode Femtosecond Pulses" JThD101-, 2007
6 Karnakis, D., "High Throughput Scribing for the Manufacture of LED Components" 207-211, 2004
7 Rezaei, S., "Burs-Train Generation for Femtosecond Laser Filamentation-driven micromachining" University of Toronto 2011
8 Ohmura, E., "Analysis of Processing Mechanism in Stealth Dicing of Ultra Thin Silicon Wafer" 2 (2): 540-549, 2008
9 Ohmura, E., "Analysis of Internal Crack Propagation in Silicon Due to Permeable Pulse Laser Irradiation: Study on Processing Mechanism of Stealth Dicing" 46-52, 2011