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https://www.riss.kr/link?id=A30003189
2002
-
500
KCI등재
학술저널
113-117(5쪽)
0
상세조회0
다운로드다국어 초록 (Multilingual Abstract)
Fatigue characteristics of ferroelectric Pb(Zr,Ti)O_3 (PZT) based capacitors through donor doping is reported in this paper. La substitution up to 10% were carried out to study systematically the fatigue behaviors of epitaxial ferroelectric capacitors...
Fatigue characteristics of ferroelectric Pb(Zr,Ti)O_3 (PZT) based capacitors through donor doping is reported in this paper. La substitution up to 10% were carried out to study systematically the fatigue behaviors of epitaxial ferroelectric capacitors grown on Si using (Ti_0.9Al_0.1)N/Pt conducting barrier composite. Ferroelectric capacitors substituted with 10% La show sufficient low voltage switched polarization and fatigue free performance. Systematic decrease in the tetragonality of the ferroelectric phase (i.e., c/a ratio) results in the corresponding reduction in coercive voltage, sufficient remnant polarization at 1.5-3V, and good fatigue property.
PECVD 에 의해 형성된 TiCN 박막의 형상 및 밀착성