Cd_(2)SnO_(4) transparent conducting films were deposited on the pyrex glass plate by spray pyrolysis method. The dependence of their electrical, optical and structural properties were investigated. The optimum conditions were such that substrate temp...
Cd_(2)SnO_(4) transparent conducting films were deposited on the pyrex glass plate by spray pyrolysis method. The dependence of their electrical, optical and structural properties were investigated. The optimum conditions were such that substrate temperature was above 410℃, InCl3 doping rate was 8 wt%, the values of sheet resistance and transmittance of the films in visible region fabricated under these optimum conditions were 80Ω/□ and 90~94% respectively.