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https://www.riss.kr/link?id=O38218404
1994년
eng
2166-2746
2166-2754
SCIE
학술저널
JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY B MICROELECTRONICS AND NANOMETER STRUCTURE
3460-3464 [※수록면이 p5 이하이면, Review, Columns, Editor's Note, Abstract 등일 경우가 있습니다.]
Electron, ion, and photon beams
International symposium; 38th
New Orleans; LA
1994; May
0
상세조회0
다운로드
Ultra-large-scale integration device scaling and reliability
Digital micromirror device and its application to projection displays
Evaluation of overlay accuracy for the x-ray steppre TOXS-1
Design and test of a through-the-mask alignment sensor for a vertical stage x-ray aligner