반도체 표면처리공정용 대면적 히터 플레이트의 열전달 특성에 관한 연구

다국어 초록 (Multilingual Abstract)

The numerical study for the effect of various factors that affect the temperature distribution of the process glass installed above the large rectangular heater plate was carried out. For the calculation, heat flux, distance between heat source and process glass plate, effect of vacuum condition and convection in a chamber were considered as important factors. The results showed that the temperature gradient on the glass was increased at the natural convection because of the buoyancy force increases due to the heated air. Also, the more heat flux and distance between the heater plate and glass increases, the more increasing the temperature gradient was. In the case of isothermal heating wall, the temperature variation was smaller than the uniform heat flux condition.

목차 (Table of Contents)

• Abstract
• 1. 서론
• 2. 해석대상과 해석방법
• 3. 결과 및 고찰
• 4. 결론
• 참고문헌

참고문헌 (Reference)

1 Y. D. Chung,

2 T. J. Mountziaris, 138 : 2426-, 1991

3 R. Mucciato, 221 : 758-, 2000

4 T. Bergunde, 180 : 660-, 1997

5 F. Durst, 172 : 389-, 1997

6 S. Y. Lee, 261-, 2000

7 L. Kadinski, 146 : 209-, 1995

8 J. S. Park, 3165-, 2007

9 이정훈, "Susceptor design by numerical analysis in horizontal CVD reactor" 한국결정성장학회 15 (15): 135-140, 2005

10 F. P. Incorpera, "Fundamentals of Heat and Mass Transfer 5th Ed" John Wiley & Sons 2001