수평 구동형 MEMS 관성 스위치 설계 및 성능해석

국문 초록 (Abstract)

스프링-메스 시스템의 원리를 이용하여 수평 구동형 MEMS 관성 스위치를 설계하였다. 본 MEMS 스위치는 외부에서 발생하는 가속도를 감지하여 점화안전장치를 장전시키는 역할을 한다. 성능 모델링을 통하여 다양한 가속도 조건에서의 구동 양상을 분석하였다. 시뮬레이션 결과 가속도의 기울기가 10g/msec 이하인 경우에 MEMS 스위치는 10g에서 잘 작동하는 것으로 나타났다. 반면에, 설계변수들의 공차를 10%로 고려한 시뮬레이션 결과 스프링 폭과 길이에 의해 임계 동작 가속도가 규격(10±2g)을 벗어났다. 제작 공정상 10% 이하의 공차 관리가 어려운 스프링 폭을 두 배로 늘렸을 때 규격을 만족하는 것을 확인하고 설계보완을 제안하였다.

다국어 초록 (Multilingual Abstract)

A lateral type MEMS inertial switch was designed on the same principle as spring-mass system. The MEMS switch is used for arming mechanism of the arm-fire device by sensing the applied acceleration. We analyzed the switching capability of the MEMS switch under various acceleration conditions via performance model. Simulation results showed that the MEMS switch works very well at 10 g when the applied acceleration slope does not exceed 10g/msec. On the other hand, the threshold operating acceleration level simulation exceeded the requirement (10±2 g) due to the width and length of the spring by considering 10% tolerance of the design values. Design modification of doubling the width of the spring, which is difficult to reduce less than 10% tolerance in fabrication process, was proposed after confirming the simulation results comply the requirement.

목차 (Table of Contents)

• ABSTRACT
• 초록
• Ⅰ. 서론
• Ⅱ. 본론
• Ⅲ. 결론
• References

참고문헌 (Reference)

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