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https://www.riss.kr/link?id=O16760487
1997년
-
0734-2101
1520-8559
SCI;SCIE;SCOPUS
학술저널
JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY A VACUUMS SURFACES AND FILMS
894-898 [※수록면이 p5 이하이면, Review, Columns, Editor's Note, Abstract 등일 경우가 있습니다.]
0
상세조회0
다운로드
Approach for a three-dimensional on-chip quantification by secondary-ion mass spectrometry analysis
Effects of oxygen flooding on sputtering and ionization processes during ion bombardment
Optimized time-of-flight secondary ion mass spectroscopy depth profiling with a dual beam technique
Nondestructive depth profiling in Auger electron spectroscopy by means of partial intensity analysis