Study on the Joining of 2D Microstructure during the Fabrication of 3D Micro-Mold

다국어 초록 (Multilingual Abstract)

The 3D micro-mold which is fabricated by the femtosecond laser cutting and micro electric resistance slip welding is formed throughthe lamination of multilayer 2D microstructures. By using this technology, the 3D micro-mold with a high depth-width ratio can bemanufactured. In order to improve the laminated precision and joining strength of each layer of 2D microstructure, this researchapplied layer-by-layer micro electric resistance slip welding to weld each layer of 2D microstructure. Firstly, the proper technicalparameters were obtained through the experiments of layer-by-layer micro electric resistance slip welding. Secondly, through thelayer-by-layer micro electric resistance slip welding, multilayer 2D microstructures were weld together and a 3D micro-mold wasformed. Moreover, the anti-shear stress test of 3D micro-mold was done. In the layer-by-layer slip welding process, electrode couldproduce some losses and the losses could deposit on the surface of micro-mold. This research also studied the deposition effect ofthe electrode. Finally, based on the above studies, the micro square-hole array and the micro-gear cavity were fabricated by joiningmultilayer 2D microstructure.

참고문헌 (Reference)

1 Xu, B., "Study on Tungsten Electrode Deposition Effect of 3D Metal Micro-Mold during Laminated Slip Welding" 67 (67): 2529-2536, 2013

2 Gunawan Setia Prihandana, "Study of Workpiece Vibration in Powder-Suspended Dielectric Fluid in Micro-EDM Processes" 한국정밀공학회 14 (14): 1817-1822, 2013

3 Nguyen, M. D., "Simultaneous Micro-EDM and Micro-ECM in Low-Resistivity Deionized Water" 54 : 55-65, 2012

4 Xu, B., "Research on Micro-Electric Resistance Slip Welding of Copper Electrode during the Fabrication of 3D Metal Micro-Mold" 213 (213): 2174-2183, 2013

5 Nguyen, M. D., "Modeling of Radial Gap Formed by Material Dissolution in Simultaneous Micro-EDM and Micro-ECM Drilling using Deionized Water" 66 : 95-101, 2013

6 Liu, D. W, "Microfabrication of Thermoelectric Modules by Patterned Electrodeposition using a Multi-Channel Glass Template" 15 (15): 479-484, 2011

7 Fofonoff, T. A., "Microelectrode Array Fabrication by Electrical Discharge Machining and Chemical Etching" 51 (51): 890-895, 2004

8 Hung, J. C., "Micro-Hole Machining using Micro-EDM Combined with Electropolishing" 16 (16): 1480-1486, 2006

9 정도관, "Machining Characteristics of Micro EDM in Water using High Frequency Bipolar Pulse" 한국정밀공학회 12 (12): 195-201, 2011

10 Xuan Doan Cao, "Hybrid Micromachining of Glass Using ECDM and Micro Grinding" 한국정밀공학회 14 (14): 5-10, 2013

11 Xu, B., "Fabrication of 3D Metal Micro-Mold based on Femtosecond Laser Cutting and Micro-Electric Resistance Slip Welding" 66 (66): 601-609, 2013

12 Ekmekci, B, "Debris and Consequences in Micro Electric Discharge Machining of Micro-Holes" 65 : 58-67, 2013

13 Takahata, K., "Batch Mode Micro-Electro-Discharge Machining" 11 (11): 102-110, 2002

14 Kurita, T., "A Study of Three-Dimensional Shape Machining with an ECμM System" 46 (46): 1311-1318, 2006