크린룸 내부 환경 관리에 관한 연구 : 이물과 차압을 중심으로

다국어 초록 (Multilingual Abstract)

In today's highly sophisticated industry, the clean working space is required to improve the performance and productivity.'Clean-room' is designed to maintain the working space to be clean at all times. Its concept adopts holistic approach instead of part-by-part prescription.
Many cutting-edge manufacturing processes in industries such as semiconductor, liquid crystal display, genetic engineering, and advanced materials have achieved an excellent result by embracing the concept of clean-room. For continued growth in these industries, the concept of clean-room is viewed as the essential requirement.
The interest in clean room was sparked by the rapid growth of semiconductor industry in S. Korea. The market for clean-room technology in S. Korea is currently estimated to reach about $250 million. In this market, there is growing demand for economical design and operating technology of clean-room in addition to super clean-room technology. Future research and development need to meet this demand.
The purpose of this paper is to survey the overall status of clean-room industry in S. Korea.
We described how widespread the adoption of clean-room technology is and what market structure clean-room technology has.
The research and development activities, and the status of the currently established clean-room standard are also presented. Finally, the activities of organizations promoting clean-room concept are presented.

목차 (Table of Contents)

• Abstract i
• 목 차 iii
• 표 차례 v
• 그림 차례 vi
• 제 1 장 서론 1
• 1.1 연구 배경 및 목적 1
• 1.2 연구 범위 및 방법 2
• 제 2 장 클린룸에 대한 이론적 고찰 3
• 2.1 클린룸의 개념 3
• 2.2 클린룸의 발전 과정 5
• 2.3 클린룸 기술 사항 7
• 제 3 장 클린룸 건축 공사에 대한 기술적 분류 21
• 3.1 클린룸 건축 공사의 이해 21
• 3.2 칸막이 공사 24
• 제 4 장 사례 연구 41
• 4.1 실험 개요 41
• 4.2 실험 순서 42
• 4.3 실험 결과 42
• 4.4 분석 및 결론 48
• 제 5 장 결론 49
• 참고문헌 50