1 A. Shah, 403 : 179-187, 2002
2 H. Fujiwara, "Real-time spectroscopic ellipsometry studies of the nucleation and grain growth processes in microcrystalline silicon thin films" 63 : 115306-115614, 2001
3 O. Vetterl, "Preparation of microcrystalline silicon seed-layers with defined structural properties" 427 : 46-50, 2003
4 S.-Y. Lee, "Optimization of back reflector ZnO:Al thin film for a-Si:H thin film solar cells" 374-377, 2008
5 M. Matsukuma, "Molecular dynamics simulation of microcrystalline Si deposition processes by silane plasmas" 516 : 3443-3448, 2008
1 A. Shah, 403 : 179-187, 2002
2 H. Fujiwara, "Real-time spectroscopic ellipsometry studies of the nucleation and grain growth processes in microcrystalline silicon thin films" 63 : 115306-115614, 2001
3 O. Vetterl, "Preparation of microcrystalline silicon seed-layers with defined structural properties" 427 : 46-50, 2003
4 S.-Y. Lee, "Optimization of back reflector ZnO:Al thin film for a-Si:H thin film solar cells" 374-377, 2008
5 M. Matsukuma, "Molecular dynamics simulation of microcrystalline Si deposition processes by silane plasmas" 516 : 3443-3448, 2008