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https://www.riss.kr/link?id=O39174908
1999년
eng
1605-7422
2410-9045
학술저널
PROCEEDINGS- SPIE THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING
194-202 [※수록면이 p5 이하이면, Review, Columns, Editor's Note, Abstract 등일 경우가 있습니다.]
0819432237
In-line characterization, yield reliability, and failure analyses in microelectronic manufacturing
Conference
Edinburgh
1999; May
0
상세조회0
다운로드
Physically based model for predicting volume shrinkage in chemically amplified resists
Application and cost analysis of scatterometry for integrated metrology
Optical scatterometry with neural network model for nondestructive measurement of submicron features