Effects of Roll-to-Roll Sputtering Conditions on the Properties of Flexible TiO2 Films

다국어 초록 (Multilingual Abstract)

Flexible TiO2 films were deposited as dielectric materials for high-energy-density capacitors on polyethylene terephthalate(PET) substrates using a roll-to-roll sputtering method. Both the growth behavior and electrical properties of the flexible TiO2films were dependent on the sputtering pressure and O2/Ar gas ratio during the sputtering process. All TiO2 films had an amorphousstructure regardless of the sputtering conditions due to the low substrate temperature. Microstructural characteristics suchas the surface morphology and roughness of the films degraded with an increase in the sputtering pressure and O2 gas concentration.
The TiO2 films deposited at a low pressure showed better electrical properties than those of films deposited at a highpressure. The TiO2 films prepared at 10 mTorr exhibited a dielectric constant of approximately 90 at 1 kHz and a leakage currentdensity of 5 ~ 6 × 10-7A/cm2 at 3 MV/cm.

참고문헌 (Reference)

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