광학스캐닝 메커니즘 및 근적외선 카메라 광학계를 이용한 태양전지 웨이퍼 검사장치 개발 = Development of Inspection System With Optical Scanning Mechanism and Near-Infrared Camera Optics for Solar Cell Wafer

다국어 초록 (Multilingual Abstract)

In this paper, inspection system based on optical scanning mechanism is designed and developed for solar cell wafer. It consists of optical scanning mechanism, NIR camera optics, machinery and control system, algorithm of defect detection and software. Optical scanning mechanism is composed of geometrical camera optics and structured hybrid illumination system. It is used to inspection of surface defects. NIR camera optics is used for inspection of defects inside solar cell wafer. It is shown that surface and internal micro defects can be detected in developed inspection system for solar cell wafer.

참고문헌 (Reference)

1 연정승, "태양전지 실리콘 웨이퍼에서의 레일리기준 기반 레이저산란 패턴 분석 및 결함 검출" 한국정밀공학회 28 (28): 606-613, 2011

2 김경범, "깊이 불연속 형상 측정을 위한 레이저 응용 하이브리드 초점법" 한국정밀공학회 23 (23): 111-118, 2006

3 Byelyayev,A, "Stress Diagnostics and Crack Detection in Full-Size Silicon Wafers using Resonance Ultrasonic Vibrations" University of South Florida 2005

4 Choi, M. Y., "Measurement of Defects and Stress by Infrared Thermography" 23 (23): 30-35, 2006

5 Sunil Kumar Kopparapu, "Lighting Design for Machine Vision Application" 24 : 720-726, 2006

6 An, B. I, "Development of Inspection System for Solar Cell Wafer based on Optical Scanning Mechanism" 2011

7 Li, W. C, "Automatic Saw-mark Detection in Multi-crystalline Solar Wafer Images" 2011

8 An, B. I, "A Study on Selection of Parameters in Structured Illumination Mechanism for silicon Wafer in Solar Cell" 336-337, 2011

9 An, B. I., "A Study on Optimum Illumination Condition of Hybrid Illumination Mechanism for Solar Cell Wafer" 187-189, 2011

10 K. J., "2010 New & Renewable Energy"