1 K. J. Park, 41 : 930-, 2002
2 C. C. Cheng, 13 : 1970-, 1994
3 W. Jin, 20 : 2106-, 2002
4 M. Tuda, 19 : 711-, 2001
5 jiwon yeo, "The etching characteristics of SBT thin films in BCl$_3$ addition on Cl$_2$/Ar inductively coupled plasma" 한국물리학회 44 (44): 1092-1096, 2004
6 Seok-Hwan Lee, "Plasma Density Monitoring Based on the Capacitively- and Inductively-Coupled-Plasma Models" 한국물리학회 49 (49): 726-731, 2006
7 Halliday, Resnick, "Fundamentals of Physics (6th Edition), Chap. 30"
8 Kyong Nam Kim, "Characteristics of a Large-Area Plasma Source Using Internal Multiple U-Type Antenna" 한국물리학회 48 (48): 256-259, 2006
9 Jung-Hyung Kim, "Characteristics of CFx Radicals and Plasma Parameters in an Inductively Coupled CF4 Plasma" 한국물리학회 47 (47): 249-255, 2005
10 G. Vinogradov, "Abs. 899, 206th Meeting"
1 K. J. Park, 41 : 930-, 2002
2 C. C. Cheng, 13 : 1970-, 1994
3 W. Jin, 20 : 2106-, 2002
4 M. Tuda, 19 : 711-, 2001
5 jiwon yeo, "The etching characteristics of SBT thin films in BCl$_3$ addition on Cl$_2$/Ar inductively coupled plasma" 한국물리학회 44 (44): 1092-1096, 2004
6 Seok-Hwan Lee, "Plasma Density Monitoring Based on the Capacitively- and Inductively-Coupled-Plasma Models" 한국물리학회 49 (49): 726-731, 2006
7 Halliday, Resnick, "Fundamentals of Physics (6th Edition), Chap. 30"
8 Kyong Nam Kim, "Characteristics of a Large-Area Plasma Source Using Internal Multiple U-Type Antenna" 한국물리학회 48 (48): 256-259, 2006
9 Jung-Hyung Kim, "Characteristics of CFx Radicals and Plasma Parameters in an Inductively Coupled CF4 Plasma" 한국물리학회 47 (47): 249-255, 2005
10 G. Vinogradov, "Abs. 899, 206th Meeting"