As the industrial era moves into the information era, it’s necessary to process and store a lot of data more quickly and reliably. In order to satisfy these needs, numerous studies on the development of new semiconductors are being conducted using i...
As the industrial era moves into the information era, it’s necessary to process and store a lot of data more quickly and reliably. In order to satisfy these needs, numerous studies on the development of new semiconductors are being conducted using implantation However, due to the limited number of elements that can be produced by most systems for ion implantation researches, development of new materials has likewise been limited. In particular, we have increased the number of elements available on our 400 kV accelerator system from less than 5 to 30, including Li, Be, Na, Mg, Al, and Si.