This paper presents a result of application of input shaping to a micro-stage with a displacement amplification mechanism. The stage considered in this study is subjected to severe residual vibration in its lever mechanism to amplify displacement. The...
This paper presents a result of application of input shaping to a micro-stage with a displacement amplification mechanism. The stage considered in this study is subjected to severe residual vibration in its lever mechanism to amplify displacement. The system dynamics exhibit some nonlinear nature due to the hysteresis of the PZT actuator. Input shaping method is successfully applied to the system so as to eliminate residual vibration from the system. The experimental study also shows that staircase input is useful to avoid the performance degrade by the nonlinear characteristics.