Influence mechanism of silicon surface generation in ultraprecision turning

다국어 초록 (Multilingual Abstract)

A quantificational approach was proposed to analyze the discrepancy of monocrystalline silicon surface roughness along different crystal orientations in diamond turning on Statistical Product and Service Solutions software. This work aimed to understand how crystal orientation affects surface generation in the cutting behavior of monocrystalline silicon.
In this study, the measured surface roughness data were first processed in advance to eliminate some adverse effects of outliers. The average values of surface roughness distributions were obtained. The surface roughness values of different measurement directions were compared, and the influences of crystal orientations on surface roughness were analyzed.
Results indicate that the crystal orientation and the cutting parameters have much influence on machined surface roughness. Finding some special crystal orientations using Euclidean distance analysis with average analysis is effective. The vibration induced by crystallographic orientation is the main reason to make surface nonuniform roughness in single-point diamond turning. This finding is verified by analyzing the surface generation mechanism.

참고문헌 (Reference)

1 L. N. Abdulkadir, "Ultra-precision diamond turning of optical silicon—a review" 4 : 173-208, 2018

2 A. Mir, "The investigation of in fluence of tool wear on ductile to brittle transition in single point diamond turning of silicon" 364-365 : 233-243, 2016

3 Z. C. Lin, "Simulation of temperature field during nanoscale orthogonal cutting of monocrystalline silicon by molecular statics method" 81 (81): 58-67, 2014

4 A. Chandra, "Role of surfaces and interfaces in solar cell manufacturing" 63 (63): 797-819, 2014

5 P. D. Groot, "Principles of interference microscopy for the measurement of surface topography" 7 (7): 1-65, 2015

6 K. Abhishek, "Parametric optimization in turning of CFRP (epoxy) composites: a case experimental research with exploration of HS algorithm" 619 : 54-57, 2014

7 C. L. He, "Origins for the size effect of surface roughness in diamond turning" 106 : 22-42, 2016

8 Z. Abraham, "Kinesin, dynein, mechanics: measurement methods and research applications" 140 : 1-11, 2018

9 C. L. He, "Influencing factors and theoretical modeling methods of surface roughness in turning process: state-of-the-art" 129 : 15-26, 2018

10 P. Lehmann, "Fundamental aspects of resolution and precision in vertical scanning white-light interferometry" 4 : 1-10, 2016

11 J. Cheng, "Experimental study of surface generation and force modeling in micro-grinding of single crystal silicon considering crystallographic effects" 77 : 1-15, 2014

12 F. F. Xu, "Effects of recovery and side flow on surface generation in nano-cutting of single crystal silicon" 143 : 133-142, 2018

13 M. Mukaida, "Ductile machining of monocrystalline silicon for microlens arrays by ultra-precision diamond turning using a slow tool servo" 115 : 2-14, 2017

14 Y. L. Chen, "Ductile cutting of silicon microstructures with surface inclination measurement and compensation by using a force sensor integrated single point diamond tool" 26 : 1-10, 2016

15 S. Z. Chavoshi, "Dislocation-mediated plasticity in silicon during nanometric cutting: a molecular dynamics simulation study" 51 : 60-70, 2016

16 J. Yan, "Crystallographic effect on subsurface damage formation in silicon microcutting" 61 : 131-134, 2012

17 R. K. Yadav, "Assessment of machinability of inconel 718: a comparative study of CVD & PVD coated tools" 26 : 281-297, 2019

18 C. F. Cheun, "Anisotropy of surface roughness in diamond turning of brittle single crystals" 17 (17): 251-267, 2002

19 F. Z. Fang, "An experimental study of edge radius effect on cutting single crystal silicon" 22 : 703-707, 2003

20 S. J. Zhang, "A review of surface roughness generation in ultra-precision machining" 91 : 76-95, 2015

21 S. J. Zhang, "A review of surface roughness generation in ultra-precision machining" 91 : 76-95, 2015

22 S. J. Zhang, "A review of machine-tool vibration and its influence upon surface generation in ultra-precision machining" 91 : 34-42, 2015