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https://www.riss.kr/link?id=O49877132
2008년
jpn
학술저널
PROCEEDINGS OF THE SYMPOSIUM ON SEMICONDUCTORS AND INTEGRATED CIRCUITS TECHNOLOGY
85-88 [※수록면이 p5 이하이면, Review, Columns, Editor's Note, Abstract 등일 경우가 있습니다.]
Symposium on semiconductors and integrated circuits technology
72nd
Tokyo, Japan
2008; Jul
0
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R & D Trend and Problems of LSI Multilevel Interconnect Technology
How to Realize a Robust Porous Low-k Film by Cost-effective Process ?
The Study of Reduction in Etching-rate of SiOC Film and Improvement of Etching-stop in Via-etching