<P><B>Abstract</B></P> <P>For the applications such as flexible displays and solar cells, the direct deposition of crystalline silicon films on a flexible polymer substrate has been a great issue. Here, we investigated t...
http://chineseinput.net/에서 pinyin(병음)방식으로 중국어를 변환할 수 있습니다.
변환된 중국어를 복사하여 사용하시면 됩니다.
https://www.riss.kr/link?id=A107484254
2016
-
SCOPUS,SCIE
학술저널
151-157(7쪽)
0
상세조회0
다운로드다국어 초록 (Multilingual Abstract)
<P><B>Abstract</B></P> <P>For the applications such as flexible displays and solar cells, the direct deposition of crystalline silicon films on a flexible polymer substrate has been a great issue. Here, we investigated t...
<P><B>Abstract</B></P> <P>For the applications such as flexible displays and solar cells, the direct deposition of crystalline silicon films on a flexible polymer substrate has been a great issue. Here, we investigated the direct deposition of polycrystalline silicon films on a polyimide film at the substrate temperature of 200°C. The low temperature deposition of crystalline silicon on a flexible substrate has been successfully made based on two ideas. One is that the Si–Cl–H system has a retrograde solubility of silicon in the gas phase near the substrate temperature. The other is the new concept of non-classical crystallization, where films grow by the building block of nanoparticles formed in the gas phase during hot-wire chemical vapor deposition (HWCVD). The total amount of precipitation of silicon nanoparticles decreased with increasing HCl concentration. By adding HCl, the amount and the size of silicon nanoparticles were reduced remarkably, which is related with the low temperature deposition of silicon films of highly crystalline fraction with a very thin amorphous incubation layer. The dark conductivity of the intrinsic film prepared at the flow rate ratio of <I>R</I> <SUB>HCl</SUB>=[HCl]/[SiH<SUB>4</SUB>]=3.61 was 1.84×10<SUP>–6</SUP> Scm<SUP>−1</SUP> at room temperature. The Hall mobility of the n-type silicon film prepared at <I>R</I> <SUB>HCl</SUB>=3.61 was 5.72cm<SUP>2</SUP> V<SUP>−1</SUP>s<SUP>−1</SUP>. These electrical properties of silicon films are high enough and could be used in flexible electric devices.</P> <P><B>Highlights</B></P> <P> <UL> <LI> Polycrystalline silicon thin films was successfully deposited on a polyimide film. </LI> <LI> The crystalline silicon films were deposited based non-classical crystallization. </LI> <LI> By adding HCl, the amount and the size of silicon nanoparticles were reduced. </LI> </UL> </P>