Design and Fabrication of a Scanning Electron Microscope (SEM) with an Electrostatic Column for Process Embedment

다국어 초록 (Multilingual Abstract)

In a scanning electron microscope (SEM), the electron beam emitted from an electron gun isfocused by a lens and then scanned onto the substrate. The SEM images are obtained by detectingthe secondary electrons produced by the interactions between the primary electrons and the substratematerial. Currently, various kinds of products for microscopy, such as field emission (FE)SEM which uses the field emission and the helium ion microscope (HIM) which utilizes helium ionsas imaging particles, are widely designed for the purpose of improving the resolution of images.
However, these conventional devices are not suitable for processing because they require a highvacuum environment or because they allow easy contaminated by the plasma-forming elements. Inthis research a study on a mini-SEM with an electrostatic focusing lens that is applicable for materialtreatment in semiconductor manufacturing processes and for inspection devices was conducted.
Modification of the column design in order to overcome the shortcomings of electromagnet and thebulky size by adopting an electrostatic lens will be presented.

참고문헌 (Reference)

1 P. W. Hawkes., "Science of Microscopy, vol. 1" Springer 2007

2 R. E. Lee., "Scanning Electron Microscopy and X-ray Microanalysis" PTR Prentice Hall 1993

3 C. Ducati, "Materials Science T2: Electron Microscopy" Cambridge University 2012

4 박만진, "Design and fabrication of a scanning electron microscope using a finite element analysis for electron optical system" 대한기계학회 22 (22): 1734-1746, 2008