This study was designed to fabricate the micro-electro-mechanical systems (MEMS) parts such as micro spur gears using hot extrusion of gas atomized Al-78Zn powders. For this purpose, it is important to develop new methods to fabricate micro-dies and c...
This study was designed to fabricate the micro-electro-mechanical systems (MEMS) parts such as micro spur gears using hot extrusion of gas atomized Al-78Zn powders. For this purpose, it is important to develop new methods to fabricate micro-dies and choose suitable extrusion conditions for a micro-forming. Micro-dies with Ni were fabricated by LIGA technology. LIGA technology was capable to produce micro-extrusion dies with close tolerances, thick bearing length and adequate surface quality. Superplastic Al-78Zn powders have the great advantage in achieving deformation under low stresses and exhibiting good micro formability with average strain rates ranging from 10<SUP>-3</SUP> to 10<SUP>-2</SUP> s<SUP>-1</SUP> and constant temperatures ranging from 503 to 563K. Al-78Zn powders were compacted into a cylindrical shape (Φ3xh10) under compressive force of 10kN and, subsequently, the compacted powders were extruded at 563K in a hot furnace. Micro-extrusion has succeeded in forming micro-gear shafts.