ITO films on PET substrate were prepared by DC magnetron sputtering method using powdery target with different deposition conditions. In addition, the electrical and optical properties were investigated. As the sputtering power was higher, the resisti...
ITO films on PET substrate were prepared by DC magnetron sputtering method using powdery target with different deposition conditions. In addition, the electrical and optical properties were investigated. As the sputtering power was higher, the resistivity of ITO films increased. The optical transmittance deteriorated with increasing sputtering power and thickness. From this results, we could deposited ITO films with 8×10-3 Ω-cm of resistivity and 80% of transmittance at optimal conditions.