Design and Fabrication of a Disposable Nanoactuator Using 3D Printing

다국어 초록 (Multilingual Abstract)

Nanoscale patterning has been widely used in various research fields. Conventional technology, however, has its limitations such as high cost and complicated processes. Recently, many alternative processes have been proposed to replace them. The major requirement for such an alternative process is that it does not require a mask, it must be capable of being processed at room temperature, and it needs to be an eco-friendly process. Photo electrophoretic deposition is a promising process that has various advantages, but it needs nanoscale movement of the reaction cell. In this study, a disposable nanoactuator was designed and manufactured to utilize the photo electrophoretic deposition process. In designing the nanoactuator, it is possible to accurately hold the position in the order of hundreds of nanometers for tens of seconds. The main variables are optimized to have a structure that can cause only single-axis displacement in a desired direction. Also, based on this design, the nanoactuator was fabricated by a 3D printer to verify its effectiveness. As a result, it was possible to manufacture an actuator that satisfies the desired performance, and a device will be fabricated by utilizing the actuator in a photo electrophoretic deposition process.

참고문헌 (Reference)

1 Yu, B. -S., "Wearable 1 V operating thin-film transistors with solution-processed metal-oxide semiconductor and dielectric films fabricated by deep ultra-violet photo annealing at low temperature" 9 : 8416-, 2019

2 Indrišiūnas, S., "Two complementary ways of thin-metal-film patterning using laser beam interference and direct ablation" 23 : 095034-, 2013

3 Myeongjin Kim, "Study of a Line‐Patterning Process Using Impact Print‐Type Hot Embossing Technology" Wiley 22 (22): 1901011-, 2020

4 Lee, J., "Stretchable skin-like cooling/heating device for reconstruction of artifi cial thermal sensation in virtual reality" 30 : 1909171-, 2020

5 Li, P., "Silver nanostructures synthesis via optically induced electrochemical deposition" 6 : 28035-, 2016

6 Gensowski, K., "Selective seed layer patterning of PVD metal stacks by electrochemical screen printing for solar cell applications" 28 : 538-544, 2020

7 Liu, N., "Rapid fabrication of nanomaterial electrodes using digitally controlled electrokinetics" 13 : 245-253, 2014

8 Mora, J., "Projection based lightdirected electrophoretic deposition for additive manufacturing" 22 : 330-333, 2018

9 Carbonell, C., "Polymer brush hypersurface photolithography" 11 : 1244-, 2020

10 Liu, N., "Optically-controlled digital electrodeposition of thin-fi lm metals for fabrication of nano-devices" 5 : 838-848, 2015

11 Andrew J. Pascall, "Light-Directed Electrophoretic Deposition: A New Additive Manufacturing Technique for Arbitrarily Patterned 3D Composites" Wiley 26 (26): 2252-2256, 2014

12 Park, J. -U., "Highresolution electrohydrodynamic jet printing" 6 : 782-789, 2007

13 Lee, H. B., "Flexible transparent conducting electrodes based on metal meshes for organic optoelectronic device applications : A review" 7 : 1087-1110, 2019

14 Dongwon Yun, "Development of an Electromagnetic Actuator for the Hot-Embossing Process" MDPI AG 9 (9): 948-, 2020

15 Mao, Z., "Developing O/O(oil-inoil)droplet generators on a chip by using ECF(electro-conjugate fluid)micropumps" 296 : 126669-, 2019

16 Dai, G., "Controllable 3D alginate hydrogel patterning via visiblelight induced electrodeposition" 8 : 025004-, 2016

17 Jiyong Park, "A Study of Hybrid Drying Process to Improve Drying Speed and Electrical Conductivity for Roll-to-Roll Printing" IOP Publishing 49 (49): 05EC10-, 2010