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https://www.riss.kr/link?id=O51897882
2009년
eng
1605-7422
2410-9045
학술저널
PROCEEDINGS - SPIE THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING
7275 1A [※수록면이 p5 이하이면, Review, Columns, Editor's Note, Abstract 등일 경우가 있습니다.]
9780819475282; 0819475289
Design for manufacturability through design-process integration
3rd
San Jose, CA
2009; Feb
0
상세조회0
다운로드
Hierarchical modeling of spatial variability with a 45nm example [7275-04]
Layout electrical cooptimization for increased tolerance to process variations [7275-37]
Tiny footprint programmable electrical defocus monitors [7275-06]
The nebulous hotspot and algorithm variability [7275-09]