생체 삽입형 유연한 마이크로 전극의 제작 및 평가 = Fabrication and Evaluation of the Flexible and Implantable Micro Electrode

다국어 초록 (Multilingual Abstract)

- In this paper, we fabricated and evaluated polydimethylsiloxane(PDMS)-based flexible and implantable micro electrodes. The electrode patterning was carried out with the photolithography and chemical etching process after e-beam evaporation of 100 ÅTi and 1000 Å Au. The PDMS substrate was treated by oxygen plasma using reactive ion etching(RIE) system to improve the adhesiveness of PDMS and metal layers. The minimum line width of fabricated micro electrode was 20 ㎛. After finished patterning, we did packaging with PDMS and then brought up the electrode's part about 40 ㎛ with gold electroplating. The Hank's balanced salt solution(HBSS) test was carried out for 6 month for endurance of fabricated micro electrode. We carried out in-vivo test for the evaluation of biocompatibility by implanting electrodes under the ICR mouse skin for 42 days.

참고문헌 (Reference)

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