1 W. H. Ko, "Touch mode capacitive pressure sensors for industrial applications" 284-289, 1997.
2 S. Yamamoto, "Touch mode capacitive pressure sensors" Touch mode capacitive pressure sensors 45-49, 2003.
3 W. H. Ko, "Touch mode capacitive pressure sensors" a-75 : 242-251, 1999.
4 "Theory of Plates and Shells 2nd edition" McGRAW-HILL 1981.
5 이윤영, "SAW sensor를 이용한 Tire Pressure Moni- Toring System 설계에 관한 연구" 2003.
6 Q. Wang, "Modeling of touch mode Capacitive pressure sensors and diaphragms" a-75 : 230-241, 1999.
7 B. K. Choi, "Modeling of stretching effects on the contacted diaphragm of pressure transducers by LIGA process" a-69 : 192-198, 1998.
8 C.H. Tsau, "Fabri- cation of wafer-level thermocompression bonds" 11 : 2002-, 2002
9 M. Hill, "Automotive tyre pressure sensing" iee colloquium : 51-56, 1992.
10 W. B. Kim, "Application of au-sn eutectic bonding in hermetic RF MEMS wafer level packaging" 215-219, 2004.
1 W. H. Ko, "Touch mode capacitive pressure sensors for industrial applications" 284-289, 1997.
2 S. Yamamoto, "Touch mode capacitive pressure sensors" Touch mode capacitive pressure sensors 45-49, 2003.
3 W. H. Ko, "Touch mode capacitive pressure sensors" a-75 : 242-251, 1999.
4 "Theory of Plates and Shells 2nd edition" McGRAW-HILL 1981.
5 이윤영, "SAW sensor를 이용한 Tire Pressure Moni- Toring System 설계에 관한 연구" 2003.
6 Q. Wang, "Modeling of touch mode Capacitive pressure sensors and diaphragms" a-75 : 230-241, 1999.
7 B. K. Choi, "Modeling of stretching effects on the contacted diaphragm of pressure transducers by LIGA process" a-69 : 192-198, 1998.
8 C.H. Tsau, "Fabri- cation of wafer-level thermocompression bonds" 11 : 2002-, 2002
9 M. Hill, "Automotive tyre pressure sensing" iee colloquium : 51-56, 1992.
10 W. B. Kim, "Application of au-sn eutectic bonding in hermetic RF MEMS wafer level packaging" 215-219, 2004.
11 C.Y. Wang, "An eutectic bonding technology at a temperature below the eutectic point" proceedings. (proceedings.): 502 1992-507,
12 D. M. Achneider, "A new analytical solution for the load-deflection of square membranes" 238-241, 1995.